In situ X-ray diffraction studies on the piezoelectric response of PZT thin 
films

Davydok, Anton; Cornelius, Thomas Walter; Mocuta, Cristian; Lima, E. C.; Araújo, Eudes B.; Thomas, Olivier

doi:10.1016/j.tsf.2016.01.045

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In situ X-ray diffraction studies on the piezoelectric response of PZT thin films

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Davydok, Anton
Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;
Aix Marseille Université, CNRS, Université de Toulon, IM2NP UMR 7334, Marseille, France;

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Citation

Davydok, A., Cornelius, T. W., Mocuta, C., Lima, E. C., Araújo, E. B., & Thomas, O. (2016). In situ X-ray diffraction studies on the piezoelectric response of PZT thin films. Thin Solid Films, 603, 29-33. doi:10.1016/j.tsf.2016.01.045.

Cite as: https://hdl.handle.net/21.11116/0000-0001-B868-B

Abstract

Piezoelectric properties of randomly oriented self-polarized PbZr0.50Ti0.50O3 (PZT) thin films were investigated using in situ synchrotron X-ray diffraction. Possibilities for investigating the piezoelectric effect using micro-sized hard X-ray beams are demonstrated and perspectives for future dynamical measurements on PZT samples with variety of compositions and thicknesses are given. Studies performed on the crystalline [100, 110] directions evidenced piezoelectric anisotropy. The piezoelectric coefficient d33 was calculated in terms of the lab reference frame (dperp) and found to be two times larger along the [100] direction than along the [110] direction. The absolute values for the dperp amount to 120 and 230 pm/V being in good agreement with experimental and theoretical values found in literature for bulk PZT ceramics. © 2016 Elsevier B.V. All rights reserved.