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Conference Paper

Small-scale plasticity in thin Cu and Al films

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Dehm,  Gerhard
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Balk,  Thomas John
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Edongué,  Hervais
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt,  Eduard
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Dehm, G., Balk, T. J., Edongué, H., & Arzt, E. (2003). Small-scale plasticity in thin Cu and Al films. Microelectronic Engineering, 70(2-4), 412-424.


Cite as: https://hdl.handle.net/21.11116/0000-0001-97EE-9
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