Polarization and phase shifting interferometry

Rothau, Sergej; Manthel, Klaus; Lindlein, Norbert

doi:10.1117/12.2269720

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Polarization and phase shifting interferometry

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Rothau, Sergej
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Lindlein, Norbert
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Citation

Rothau, S., Manthel, K., & Lindlein, N. (2017). Polarization and phase shifting interferometry. In OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION X. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA: SPIE-INT SOC OPTICAL ENGINEERING. doi:10.1117/12.2269720.

Cite as: https://hdl.handle.net/21.11116/0000-0000-6259-E

Abstract

This publication presents a novel interferometric method for the simultaneous measurement of the phase and state of polarization of a light wave with arbitrary, in particular locally varying elliptical polarization. The measurement strategy is based on variations of the reference wave concerning phase and polarization and processing the interference patterns so obtained. With this method, that is very similar to the classical phase shifting interferometry, a complete analysis of spatially variant states of polarization and their phase fronts can be done in one measurement cycle. Furthermore, a direct analysis of specimens under test regarding birefringence and the impact on the phase of the incoming light can be realized. The theoretical description of the investigated methods and their experimental implementation are presented.