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Plasmonic gold helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits

MPG-Autoren
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Haverkamp,  Caspar
Helmoltz-Center Berlin for Materials & Energy (HZB);
Christiansen Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;

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Hoeflich,  Katja
Micro- & Nanostructuring, Technology Development and Service Units, Max Planck Institute for the Science of Light, Max Planck Society;
Helmoltz-Center Berlin for Materials & Energy (HZB);

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Jaeckle,  Sara
Helmoltz-Center Berlin for Materials & Energy (HZB);
Christiansen Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;

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Christiansen,  Silke
Christiansen Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;
Helmoltz-Center Berlin for Materials & Energy (HZB);
Free University of Berlin, Dept Phys;

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Zitation

Haverkamp, C., Hoeflich, K., Jaeckle, S., Manzoni, A., & Christiansen, S. (2017). Plasmonic gold helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits. NANOTECHNOLOGY, 28(5): 055303. doi:10.1088/1361-6528/28/5/055303.


Zitierlink: https://hdl.handle.net/21.11116/0000-0000-8A49-3
Zusammenfassung
Electron beam induced deposition (EBID) currently provides the only direct writing technique for truly three-dimensional nanostructures with geometrical features below 50 nm. Unfortunately, the depositions from metal-organic precursors suffer from a substantial carbon content. This hinders many applications, especially in plasmonics where the metallic nature of the geometric surfaces is mandatory. To overcome this problem a post-deposition treatment with oxygen plasma at room temperature was investigated for the purification of gold containing EBID structures. Upon plasma treatment, the structures experience a shrinkage in diameter of about 18 nm but entirely keep their initial shape. The proposed purification step results in a core-shell structure with the core consisting of mainly unaffected EBID material and a gold shell of about 20 nm in thickness. These purified structures are plasmonically active in the visible wavelength range as shown by dark field optical microscopy on helical nanostructures. Most notably, electromagnetic modeling of the corresponding scattering spectra verified that the thickness and quality of the resulting gold shell ensures an optical response equal to that of pure gold nanostructures.