Sputtering of rough surfaces: a 3D simulation study

Toussaint, U. von; Mutzke, A.; Manhard, A.

doi:10.1088/1402-4896/aa90be

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Sputtering of rough surfaces: a 3D simulation study

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Toussaint, U. von
Numerical Methods in Plasma Physics (NMPP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Mutzke, A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Manhard, A.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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https://doi.org/10.1088/1402-4896/aa90be
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Toussaint, U. v., Mutzke, A., & Manhard, A. (2017). Sputtering of rough surfaces: a 3D simulation study. Physica Scripta, T170: 014056. doi:10.1088/1402-4896/aa90be.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002E-375C-F

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