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Fabrication of regularly arranged nanocolumns on diamond(100) using micellar masks

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Spatz,  Joachim P.
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

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Citation

Koslowski, B., Strobel, S., Herzog, T., Heinz, B., Boyen, H. G., Notz, R., et al. (2000). Fabrication of regularly arranged nanocolumns on diamond(100) using micellar masks. Journal of Applied Physics, 87(10), 7533-7538. doi:10.1063/1.373019.


Cite as: https://hdl.handle.net/11858/00-001M-0000-002A-22BA-D
Abstract
Cylindrical diamond columns of 15 nm height and 10 nm diameter have been prepared on a diamond(100) substrate by exploiting the self-organization of metal-loaded diblock copolymers. For this purpose, chemomechanically polished substrates of synthetic (high pressure high temperature) diamond exhibiting extremely low roughness (typical root-mean-square roughness 60 pm) were covered by a monolayer of gold-loaded inverse polystyrene-block-poly(2-vinylpyridine) micelles which self-organize in an hexagonal order on the substrate. After burning off the blockcopolymer in an oxygen plasma, the resulting Au nanoparticles act as a mask during further etching the diamond substrate in this plasma. As a result, Au-capped diamond columns are formed with an approximate size of the former gold particles. After removing the Au caps by evaporation at 1100 °C in ultrahigh vacuum, an array of diamond nanocolumns is obtained. As a consequence of this preparation process, the columns form an hexagonal lattice with a separation of 85 nm reflecting the arrangement of the self-organized micelles. The successive states of sample preparation were characterized by atomic force microscopy, Rutherford backscattering, and in situ scanning tunneling microscopy.