Stress and doping uniformity of laser crystallized amorphous silicon in thin 
film silicon solar cells

Agaiby, R. M. B.; Becker, M.; Thapa, S. B.; Urmoneit, U.; Berger, A.; Gawlik, A.; Sarau, G.; Christiansen, S. H.

doi:10.1063/1.3319654

Datensatz

DATENSATZ AKTIONENEXPORT

Zur Ablage hinzufügen

Lokale TagsFreigabegeschichteDetailsÜbersicht

Freigegeben

Zeitschriftenartikel

Stress and doping uniformity of laser crystallized amorphous silicon in thin film silicon solar cells

MPG-Autoren

/persons/resource/persons201176

Sarau, G.
Micro- & Nanostructuring, Technology Development and Service Units, Max Planck Institute for the Science of Light, Max Planck Society;

/persons/resource/persons201040

Christiansen, S. H.
Christiansen Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;
Micro- & Nanostructuring, Technology Development and Service Units, Max Planck Institute for the Science of Light, Max Planck Society;

Externe Ressourcen

Es sind keine externen Ressourcen hinterlegt

Volltexte (beschränkter Zugriff)

Für Ihren IP-Bereich sind aktuell keine Volltexte freigegeben.

Volltexte (frei zugänglich)

Es sind keine frei zugänglichen Volltexte in PuRe verfügbar

Ergänzendes Material (frei zugänglich)

Es sind keine frei zugänglichen Ergänzenden Materialien verfügbar

Zitation

Agaiby, R. M. B., Becker, M., Thapa, S. B., Urmoneit, U., Berger, A., Gawlik, A., et al. (2010). Stress and doping uniformity of laser crystallized amorphous silicon in thin film silicon solar cells. JOURNAL OF APPLIED PHYSICS, 107(5): 054312. doi:10.1063/1.3319654.

Zitierlink: https://hdl.handle.net/11858/00-001M-0000-002D-6B1F-B

Zusammenfassung

Simultaneous and locally resolved determination of the mechanical stress variation and the free hole concentration using Raman spectroscopy is demonstrated in laser crystallized amorphous silicon layers. Such layers are often used for the fabrication of thin film solar cells, e. g., on borosilicate glass substrates. The combined effects of stress and doping on the Raman signal can be separated based on the use of three wavelengths in the visible. The results show that the free hole concentration in the samples investigated varies between 1 x 10(18) and 1.3 x 10(19) cm(-3). Stress as well as the free hole concentration vary substantially within the sample. The stress level varies between 575 and 850 MPa (+/- 12 MPa). Cross-sectional transmission electron microscopy images show the presence of extended lattice defects such as dislocations and grain boundaries in the crystallized Si layer which could account for the lateral stress variations detected by Raman spectroscopy. The impact of film inhomogeneity in terms of stress and doping on the performance of a solar cell will be discussed. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3319654]