Datensatz

Zusammenfassung

We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V-2 with an on-chip capacitor that was optimized to exert forces up to 1 mu N at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q-factors up to 2.2 x 10(6) place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to g(0)/2 pi = 353 kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities. (C) 2016 Optical Society of America