Intercomparison of ion beam analysis software for the simulation of 
backscattering spectra from two-dimensional structures

Mayer, M.; Malinsky, P.; Schiettekatte, F.; Zolnai, Z.

doi:10.1016/j.nimb.2016.08.010

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Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures

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Mayer, M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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http://dx.doi.org/10.1016/j.nimb.2016.08.010
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Citation

Mayer, M., Malinsky, P., Schiettekatte, F., & Zolnai, Z. (2016). Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 385, 65-73. doi:10.1016/j.nimb.2016.08.010.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002B-5075-C

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