Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

Ganser, Christian; Fritz-Popovski, Gerhard; Morak, Roland; Sharifi, Parvin; Marmiroli, Benedetta; Sartori, Barbara; Amenitsch, Heinz; Griesser, Thomas; Teichert, Christian; Paris, Oskar

doi:10.3762/bjnano.7.56

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Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

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Sharifi, Parvin
Univ Leoben, Inst Phys, Leoben, Austria;
Research Group Marlow, Max-Planck-Institut für Kohlenforschung, Max Planck Society;

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Citation

Ganser, C., Fritz-Popovski, G., Morak, R., Sharifi, P., Marmiroli, B., Sartori, B., et al. (2016). Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers. Beilstein Journal of Nanotechnology, 7, 637-644. doi:10.3762/bjnano.7.56.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002A-F00C-4

Abstract

We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.