date: 2015-08-19T06:07:17Z pdf:PDFVersion: 1.7 pdf:docinfo:title: New design of electrostatic mirror actuators for application in high-precision interferometry xmp:CreatorTool: IOPP access_permission:can_print_degraded: true subject: Classical and Quantum Gravity, 32(2015) 175021. doi:10.1088/0264-9381/32/17/175021 crossmarkMajorVersionDate: 2015-08-19 dc:format: application/pdf; version=1.7 pdf:docinfo:custom:robots: noindex pdf:docinfo:creator_tool: IOPP access_permission:fill_in_form: true pdf:encrypted: false dc:title: New design of electrostatic mirror actuators for application in high-precision interferometry modified: 2015-08-19T06:07:17Z cp:subject: Classical and Quantum Gravity, 32(2015) 175021. doi:10.1088/0264-9381/32/17/175021 pdf:docinfo:custom:CrossMarkDomains[1]: iop.org robots: noindex pdf:docinfo:subject: Classical and Quantum Gravity, 32(2015) 175021. doi:10.1088/0264-9381/32/17/175021 pdf:docinfo:custom:crossmarkMajorVersionDate: 2015-08-19 pdf:docinfo:creator: H Wittel meta:author: S Hild meta:creation-date: 2015-08-19T06:07:17Z created: 2015-08-19T06:07:17Z access_permission:extract_for_accessibility: true Creation-Date: 2015-08-19T06:07:17Z pdf:docinfo:custom:doi: 10.1088/0264-9381/32/17/175021 Author: S Hild doi: 10.1088/0264-9381/32/17/175021 pdf:unmappedUnicodeCharsPerPage: 0 dc:description: Classical and Quantum Gravity, 32(2015) 175021. doi:10.1088/0264-9381/32/17/175021 Keywords: interferometry; actuator; electrostatic drive; 04.80.Nn; 95.75.Kk access_permission:modify_annotations: true dc:creator: S Hild description: Classical and Quantum Gravity, 32(2015) 175021. doi:10.1088/0264-9381/32/17/175021 dcterms:created: 2015-08-19T06:07:17Z Last-Modified: 2015-08-19T06:07:17Z dcterms:modified: 2015-08-19T06:07:17Z title: New design of electrostatic mirror actuators for application in high-precision interferometry xmpMM:DocumentID: uuid:71c1af8b-5af7-4189-816b-a06b4a6439f6 Last-Save-Date: 2015-08-19T06:07:17Z CrossMarkDomains[1]: iop.org pdf:docinfo:keywords: interferometry; actuator; electrostatic drive; 04.80.Nn; 95.75.Kk pdf:docinfo:modified: 2015-08-19T06:07:17Z meta:save-date: 2015-08-19T06:07:17Z Content-Type: application/pdf X-Parsed-By: org.apache.tika.parser.DefaultParser creator: S Hild dc:subject: interferometry; actuator; electrostatic drive; 04.80.Nn; 95.75.Kk access_permission:assemble_document: true xmpTPg:NPages: 12 pdf:charsPerPage: 543 access_permission:extract_content: true access_permission:can_print: true meta:keyword: interferometry; actuator; electrostatic drive; 04.80.Nn; 95.75.Kk access_permission:can_modify: true pdf:docinfo:created: 2015-08-19T06:07:17Z