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Conference Paper

Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics

MPS-Authors
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Eslami,  S.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Gibbs,  J. G.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mark,  A. G.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Lee,  T. C.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Jeong,  H.-H.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Kim,  I.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Fischer,  P.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Inst. für Physikalische Chemie, Univ. Stuttgart;

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Citation

Eslami, S., Gibbs, J. G., Mark, A. G., Lee, T. C., Jeong, H.-H., Kim, I., et al. (2015). Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics. Proceedings of SPIE, 9374: 93740R-1.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-5093-5
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