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Direct Identification of the Synergism between Methyl Radicals and Atomic Hydrogen during Growth of Amorphous Hydrogenated Carbon Films

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von Keudell,  A.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Meier,  M.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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von Keudell, A., Schwarz-Selinger, T., Meier, M., & Jacob, W. (2000). Direct Identification of the Synergism between Methyl Radicals and Atomic Hydrogen during Growth of Amorphous Hydrogenated Carbon Films. Applied Physics Letters, 76, 676-678. Retrieved from http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000076000006000676000001&idtype=cvips&prog=normal.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-5E11-4
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