Analytical and numerical depth resolution functions in sputter profiling

Hofmann, S.; Liu, Y.; Wang, J. Y.; Kovac, J.

doi:10.1016/j.apsusc.2014.06.159

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Analytical and numerical depth resolution functions in sputter profiling

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Hofmann, S.
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., Liu, Y., Wang, J. Y., & Kovac, J. (2014). Analytical and numerical depth resolution functions in sputter profiling. Applied Surface Science, 314, 942-955. doi:10.1016/j.apsusc.2014.06.159.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0023-DB28-F

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