Quantification of AES depth profiling data of polycrystalline Al films with 
Gaussian and non-Gaussian surface height distributions

Jian, W.; Liu, Y.; Wang, X. Y.; Rao, S. P.; Hofmann, S.; Wang, J. Y.

doi:10.1002/sia.5241

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Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non-Gaussian surface height distributions

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Hofmann, S.
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Jian, W., Liu, Y., Wang, X. Y., Rao, S. P., Hofmann, S., & Wang, J. Y. (2013). Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non-Gaussian surface height distributions. Surface and Interface Analysis, 45(7), 1148-1151. doi:10.1002/sia.5241.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0015-8876-C

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