Influence of non-Gaussian roughness on sputter depth profile

Liu, Y.; Jian, W.; Wang, J. Y.; Hofmann, S.; Kovac, J.

doi:10.1016/j.apsusc.2013.03.114

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Influence of non-Gaussian roughness on sputter depth profile

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Hofmann, S.
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Liu, Y., Jian, W., Wang, J. Y., Hofmann, S., & Kovac, J. (2013). Influence of non-Gaussian roughness on sputter depth profile. Applied Surface Science, 276, 447-453. doi:10.1016/j.apsusc.2013.03.114.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0015-7F35-3

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