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Nano-craters due to impact of individual highly charged ions on surfaces and thin films

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons30515

Ginzel,  R.
Division Prof. Dr. Joachim H. Ullrich, MPI for Nuclear Physics, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons30383

Crespo López-Urrutia,  J.R.
Division Prof. Dr. Joachim H. Ullrich, MPI for Nuclear Physics, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons31125

Ullrich,  J.
Division Prof. Dr. Joachim H. Ullrich, MPI for Nuclear Physics, Max Planck Society;

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Citation

Ritter, R., Kowarik, G., Ginzel, R., Wilhelm, R., Heller, R., Papaléo, R. M., et al. (2012). Nano-craters due to impact of individual highly charged ions on surfaces and thin films. Journal of Physics: Conference Series, 388(part 13): 132028. doi:10.1088/1742-6596/388/13/132028.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0014-7387-B
Abstract
We present a systematic study on nano-crater formation due to impact of individual slow highly charged ions (Xe20+ − Xe50+) on thin polymethyl-metacrylate films, which have been spin-coated on a Si-wafer.