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A portable quartz micro balance for physical vapor deposition techniques

MPG-Autoren
http://pubman.mpdl.mpg.de/cone/persons/resource/persons32663

Stuckenholz,  Stefanie
Chemical Physics, Fritz Haber Institute, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons21408

Büchner,  Christin
Chemical Physics, Fritz Haber Institute, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons22172

Thielsch,  Gero
Chemical Physics, Fritz Haber Institute, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons21628

Heyde,  Markus
Chemical Physics, Fritz Haber Institute, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons21524

Freund,  Hans-Joachim
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Volltexte (frei zugänglich)

1.4819030.pdf
(Verlagsversion), 674KB

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Zitation

Stuckenholz, S., Büchner, C., Thielsch, G., Heyde, M., & Freund, H.-J. (2013). A portable quartz micro balance for physical vapor deposition techniques. Review of Scientific Instruments, 84(8): 085118. doi:10.1063/1.4819030.


Zitierlink: http://hdl.handle.net/11858/00-001M-0000-0014-594D-7
Zusammenfassung
A portable quartz crystal micro balance for physical vapor deposition techniques is presented. The device is used for the calibration of evaporators employed in the preparation of thin film systems that are studied in surface science. The design is based upon a portable sample setup, highly versatile and customizable. It can be transported within an ultrahigh vacuum system, stored in a sample garage and be used in front of different evaporators. Details of the setup are described. Finally, the performance of the device is demonstrated and compared to scanning tunneling microscopy measurements.