A portable quartz micro balance for physical vapor deposition techniques

Stuckenholz, Stefanie; Büchner, Christin; Thielsch, Gero; Heyde, Markus; Freund, Hans-Joachim

doi:10.1063/1.4819030

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A portable quartz micro balance for physical vapor deposition techniques

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Stuckenholz, Stefanie
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Büchner, Christin
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Thielsch, Gero
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Heyde, Markus
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Freund, Hans-Joachim
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Zitation

Stuckenholz, S., Büchner, C., Thielsch, G., Heyde, M., & Freund, H.-J. (2013). A portable quartz micro balance for physical vapor deposition techniques. Review of Scientific Instruments, 84(8): 085118. doi:10.1063/1.4819030.

Zitierlink: https://hdl.handle.net/11858/00-001M-0000-0014-594D-7

Zusammenfassung

A portable quartz crystal micro balance for physical vapor deposition techniques is presented. The device is used for the calibration of evaporators employed in the preparation of thin film systems that are studied in surface science. The design is based upon a portable sample setup, highly versatile and customizable. It can be transported within an ultrahigh vacuum system, stored in a sample garage and be used in front of different evaporators. Details of the setup are described. Finally, the performance of the device is demonstrated and compared to scanning tunneling microscopy measurements.