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System-Level Modeling of MEMS by Means of Model Order Reduction (Mathematical Approximation) - Mathematical Background

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Feng,  Lihong
Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society;

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Benner,  Peter
Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society;

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Feng, L., Benner, P., & Korvink, J. G. (2013). System-Level Modeling of MEMS by Means of Model Order Reduction (Mathematical Approximation) - Mathematical Background. In T. Bechtold, G. Schrag, & L. Feng (Eds.), System-level Modeling of MEMS (pp. 53-93). Weinheim: Wiley-VCH.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0013-87F8-3
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