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Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons75840

Mayer,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75526

Grévent,  C.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

Szeghalmi,  A.
Max Planck Society;

Knez,  M.
Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76272

Weigand,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75250

Baretzky,  B.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76085

Schütz,  G.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Mayer, M., Grévent, C., Szeghalmi, A., Knez, M., Weigand, M., Rehbein, S., et al. (2011). Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures. Ultramicroscopy, 111, 1706-1711. doi:10.1016/j.ultramic.2011.09.003.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-4E35-1
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