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Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons75714

Krause,  B.
Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society;

Mantilla,  M.
Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76274

Weigel,  R.
Former Central Scientific Facility ANKA Synchroton Beamline, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Krause, B., Darma, S., Kaufholz, M., Graefe, H. H., Ulrich, S., Mantilla, M., et al. (2012). Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering. Journal of Synchrotron Radiation, 19, 216-222. doi:10.1107/S0909049511052320.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-4AD7-2
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