Modular deposition chamber for in situ X-ray experiments during RF and DC 
magnetron sputtering

Krause, B.; Darma, S.; Kaufholz, M.; Graefe, H. H.; Ulrich, S.; Mantilla, M.; Weigel, R.; Rembold, S.; Baumbach, T.

doi:10.1107/S0909049511052320

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Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering

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Krause, B.
Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society;

Mantilla, M.
Max Planck Society;

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Weigel, R.
Former Central Scientific Facility ANKA Synchroton Beamline, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Krause, B., Darma, S., Kaufholz, M., Graefe, H. H., Ulrich, S., Mantilla, M., et al. (2012). Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering. Journal of Synchrotron Radiation, 19, 216-222. doi:10.1107/S0909049511052320.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-4AD7-2

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