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Conference Paper

Diffusion of ion implanted hydrogen in amorphous Si-(B)-C-N ceramics

MPS-Authors

Schmidt,  H.
Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75874

Müller,  A.
Former Dept. Materials Synthesis and Microstructure Design, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Schmidt, H., Gruber, W., Borchardt, G., Baumann, H., Müller, A., & Bill, J. (2002). Diffusion of ion implanted hydrogen in amorphous Si-(B)-C-N ceramics. In J. Cermak, & J. Vrest'al (Eds.), Proceedings of the 8th Seminar Diffusion and Thermodynamics of Materials (pp. 131-134). Brno: Masaryk University.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-49D8-8
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