Diffusion of ion implanted hydrogen in amorphous Si-(B)-C-N ceramics

Schmidt, H.; Gruber, W.; Borchardt, G.; Baumann, H.; Müller, A.; Bill, J.

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Diffusion of ion implanted hydrogen in amorphous Si-(B)-C-N ceramics

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Schmidt, H.
Max Planck Society;

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Müller, A.
Former Dept. Materials Synthesis and Microstructure Design, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Schmidt, H., Gruber, W., Borchardt, G., Baumann, H., Müller, A., & Bill, J. (2002). Diffusion of ion implanted hydrogen in amorphous Si-(B)-C-N ceramics. In J. Cermak, & J. Vrest'al (Eds.), Proceedings of the 8th Seminar Diffusion and Thermodynamics of Materials (pp. 131-134). Brno: Masaryk University.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-49D8-8

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