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Journal Article

Periodic pillar structures by Si etching of multilayer GeSi/Si islands

MPS-Authors

Zhong,  Z.
Max Planck Society;

Katsaros,  G.
Max Planck Society;

Stoffel,  M.
Max Planck Society;

Costantini,  G.
Max Planck Society;

Kern,  K.
Max Planck Society;

Schmidt,  O. G.
Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75634

Jin-Phillipp,  N. Y.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;
Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society;
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Zhong, Z., Katsaros, G., Stoffel, M., Costantini, G., Kern, K., Schmidt, O. G., et al. (2005). Periodic pillar structures by Si etching of multilayer GeSi/Si islands. Applied Physics Letters, 87(26): 263102.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-48A6-D
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