Damage analysis in Al thin films fatigued at ultrahigh frequencies

Eberl, C.; Spolenak, R.; Kraft, O.; Kubat, F.; Ruile, W.; Arzt, E.

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Damage analysis in Al thin films fatigued at ultrahigh frequencies

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Eberl, C.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Spolenak, R.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Kraft, O.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt, E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Eberl, C., Spolenak, R., Kraft, O., Kubat, F., Ruile, W., & Arzt, E. (2006). Damage analysis in Al thin films fatigued at ultrahigh frequencies. Journal of Applied Physics, 99: 113501.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-46FA-1

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