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Thermomechanical behavior of thin metal films under different ambient conditions

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons76304

Wuebben,  T.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75388

Dehm,  G.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Wuebben, T., Dehm, G., & Arzt, E. (2006). Thermomechanical behavior of thin metal films under different ambient conditions. In E. Zschech, K. Maex, P. S. Ho, H. Kawasaki, & T. Nakamura (Eds.), Stress Induced Phenomena In Metallization: Eighth International Workshop on Stress-Induced Phenomena in Metallization (pp. 98-103). Melville, NY: American Institute of Physics.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-4683-D
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