Deposition of B4C/BCN/c-BN multilayered thin films by r.f. magnetron sputtering

Bejarano, G.; Caicedo, J. M.; Baca, E.; Prieto, P.; Balogh, A. G.; Enders, S.

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Deposition of B₄C/BCN/c-BN multilayered thin films by r.f. magnetron sputtering

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Enders, S.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Bejarano, G., Caicedo, J. M., Baca, E., Prieto, P., Balogh, A. G., & Enders, S. (2006). Deposition of B₄C/BCN/c-BN multilayered thin films by r.f. magnetron sputtering. Thin Solid Films, 494(1-2), 53-57.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-4656-4

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