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Backscattering effect in quantitative AES sputter depth profiling of multilayers

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons75598

Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76256

Wang,  J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., Wang, J. Y., & Zalar, A. (2007). Backscattering effect in quantitative AES sputter depth profiling of multilayers. Surface and Interface Analysis, 39, 787-797.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-44AF-E
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