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Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/Ge/SiO2/Si structure

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons76143

Srot,  V.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75946

Phillipp,  F.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76219

van Aken,  P. A.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Laszcz, A., Ratajczak, J., Czerwinski, A., Katcki, J., Srot, V., Phillipp, F., et al. (2008). Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/Ge/SiO2/Si structure. Materials Science and Engineering B, 154–155, 175-178.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-416A-2
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