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Strain measurements on Si/SiGe heterostructures using HRTEM

MPS-Authors
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Özdöl,  V. B.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Koch,  C. T.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Phillipp,  F.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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van Aken,  P. A.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Özdöl, V. B., Koch, C. T., Phillipp, F., & van Aken, P. A. (2009). Strain measurements on Si/SiGe heterostructures using HRTEM. In W. Grogger, F. Hofer, & P. Pölt (Eds.), MC2009. Vol. 3: Materials Science (pp. 447-448). Graz: Verlag der Technischen Universität Graz, Austria.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3E1F-3
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