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Investigation of the bulge test response of molybdenum thin films at room temperature and at 100 °C

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons76062

Schneider,  A. S.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76304

Wübben,  T.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75996

Richter,  G.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;
Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Walter, M. E., Schneider, A. S., Wübben, T., Richter, G., & Arzt, E. (2009). Investigation of the bulge test response of molybdenum thin films at room temperature and at 100 °C. Strain, 45, 238-248. doi:10.1111/j.1475-1305.2008.00496.x.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3DDE-0
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