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Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons76256

Wang,  J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75858

Mittemeijer,  E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Wang, J. Y., Starke, U., & Mittemeijer, E. J. (2009). Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques. Thin Solid Films, 517, 3402-3407. doi:10.1016/j.tsf.2009.01.007.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3DD0-C
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