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Conference Paper

Development of Cu/Cu interconnections using an indium interlayer

MPS-Authors
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Sommadossi,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Gust,  W.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer,  E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Citation

Sommadossi, S., Khanna, P. K., Bhatnagar, S. K., Litynska, L., Zieba, P., Gust, W., et al. (2000). Development of Cu/Cu interconnections using an indium interlayer. In B. Jouffray, & J. Svejcar (Eds.), Euromat 99. 6th European Congress on Advanced Materials and Processes. Vol. 4 (pp. 214-218). Weinheim: Wiley-VCH.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3959-5
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