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Nanostructure characterization by sputter depth profiling: Approaching monolayer resolution

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2000). Nanostructure characterization by sputter depth profiling: Approaching monolayer resolution. In K. Yoshihara (Ed.), Fabrication and Characterization of Atomic Scale Structures. Proceedings of the 5th International Symposium on Advanced Physical Fields (pp. 563-569). Tsukuba/Japan: National Research Institute for Metals.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-391F-9
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