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Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons75598

Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2000). Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS. Surface and Interface Analysis, 30, 228-233.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3903-5
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