Diffusional Hillock formation in Al thin films contolled by creep

Kim, D.; Nix, W. D.; Arzt, E.; Deal, M. D.; Plummer, J. D.

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Diffusional Hillock formation in Al thin films contolled by creep

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Arzt, E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Kim, D., Nix, W. D., Arzt, E., Deal, M. D., & Plummer, J. D. (2000). Diffusional Hillock formation in Al thin films contolled by creep. In R. Vinci, O. Kraft, N. Moody, P. Besser, & E. Shaffer II (Eds.), Thin Films: Stresses and Mechanical Properties VIII (pp. 129-134). Warrendale/PA: MRS.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3890-D

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