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Conference Paper

Diffusional Hillock formation in Al thin films contolled by creep

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Kim, D., Nix, W. D., Arzt, E., Deal, M. D., & Plummer, J. D. (2000). Diffusional Hillock formation in Al thin films contolled by creep. In R. Vinci, O. Kraft, N. Moody, P. Besser, & E. Shaffer II (Eds.), Thin Films: Stresses and Mechanical Properties VIII (pp. 129-134). Warrendale/PA: MRS.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3890-D
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