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Journal Article

Microstructure of thermal hillocks on blanket Al thin films

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons75570

Heiland,  B.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Kim, D., Heiland, B., Nix, W. D., Arzt, E., Deal, M. D., & Plummer, J. D. (2000). Microstructure of thermal hillocks on blanket Al thin films. Thin Solid Films, 371, 278-282.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3810-F
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