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Electromigration damage in mechanically deformed Al conductor lines: Dislocations as fast diffusion paths

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Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Baker, S. P., Yoo, Y. C., Knauß, M. P., & Arzt, E. (2000). Electromigration damage in mechanically deformed Al conductor lines: Dislocations as fast diffusion paths. Acta Materialia, 48, 2199-2208.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-375C-F
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