Relation between local composition, chemical environment and phase shift 
behavior in Cr-based oxycarbonitride thin films

Smith, J. R.; Graat, P. C. J.; Bonnell, D. A.; French, R. H.

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Relation between local composition, chemical environment and phase shift behavior in Cr-based oxycarbonitride thin films

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Graat, P. C. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Smith, J. R., Graat, P. C. J., Bonnell, D. A., & French, R. H. (2001). Relation between local composition, chemical environment and phase shift behavior in Cr-based oxycarbonitride thin films. In L. Merhari, J. Rogers, A. Karim, D. Norris, & Y. Xia (Eds.), Nonlithographic and Lithographic Methods of Nanofabrications (pp. D5.3.1-D5.3.6). Warrendale, Pa.: MRS.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3665-1

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