Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by 
focused ion beam microscopy

Inkson, B. J.; Steer, T.; Möbus, G.; Wagner, T.

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Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by focused ion beam microscopy

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Wagner, T.
Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Inkson, B. J., Steer, T., Möbus, G., & Wagner, T. (2001). Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by focused ion beam microscopy. Journal of Microscopy, 201, 256-269.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3573-9

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