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Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons75598

Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., Rar, A., Moon, D. W., & Yoshihara, K. (2001). Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model. Journal of Vacuum Science & Technology A, 19(4), 1111-1115.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-34A5-5
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