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Conference Paper

Characterization and Optimazation of Semiconductor Specimen Preparation for QHREM

MPS-Authors
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Jin-Phillipp,  N. Y.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Kelsch,  M.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Phillipp,  F.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Rühle,  M.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Jin-Phillipp, N. Y., Kelsch, M., Phillipp, F., & Rühle, M. (2002). Characterization and Optimazation of Semiconductor Specimen Preparation for QHREM.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-32A5-4
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