Internal friction of copper thin layers on silicon substrates

von der Hagen, J.; Weller, M.; Arzt, E.

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Internal friction of copper thin layers on silicon substrates

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von der Hagen, J.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Weller, M.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt, E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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von der Hagen, J., Weller, M., & Arzt, E. (2002). Internal friction of copper thin layers on silicon substrates. Defect and Diffusion in Metals: An Annual Retrospective IV, 285-288.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3286-A

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