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Summary of ISO/TC 201 Technical Report: ISO/TR 15969:2000 - Surface chemical analysis - Depth profiling - Measurement of sputtered depth

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2002). Summary of ISO/TC 201 Technical Report: ISO/TR 15969:2000 - Surface chemical analysis - Depth profiling - Measurement of sputtered depth. Surface and Interface Analysis, 33(5), 453-454.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-3150-C
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