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Book Chapter

Interconnects for Microelectronics

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons76138

Spolenak,  R.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Spolenak, R., & Zschech, E. (2003). Interconnects for Microelectronics. In K. Wetzig, & C. M. Schneider (Eds.), Metal Based Thin Films for Electronics (pp. 7-24). Weinheim: Wiley-VCH.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2E19-C
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