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Sputter depth profiling in AES and XPS

MPS-Authors
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Wagner,  T.
Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wang,  J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wagner, T., Wang, J. Y., & Hofmann, S. (2003). Sputter depth profiling in AES and XPS. In D. Briggs, & J. Grant (Eds.), Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy (pp. 619-649). Chichester: IM Publications.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2DDD-D
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