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Transmission electron microscopy investigation of the microstructure and chemistry of Si/Cu/In/Cu/Si interconnections

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Sommadossi,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Gust,  W.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer,  E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Citation

Sommadossi, S., Litynska, L., Zieba, P., Gust, W., & Mittemeijer, E. J. (2003). Transmission electron microscopy investigation of the microstructure and chemistry of Si/Cu/In/Cu/Si interconnections. Materials Chemistry and Physics, 81, 566-568.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2D96-9
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