de.mpg.escidoc.pubman.appbase.FacesBean
English
 
Help Guide Disclaimer Contact us Login
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT

Released

Thesis

Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons75661

Kauffmann,  F.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

Locator
There are no locators available
Fulltext (public)
There are no public fulltexts available
Supplementary Material (public)
There is no public supplementary material available
Citation

Kauffmann, F. (2003). Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten. PhD Thesis, Universität Stuttgart, Stuttgart.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2C56-1
Abstract
There is no abstract available