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Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten

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Kauffmann,  F.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Kauffmann, F. (2003). Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten. PhD Thesis, Universität Stuttgart, Stuttgart.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2C56-1
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