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A New Method for the Determination of the Diffusion-Induced Concentration Profile and the Interdiffusion Coefficient for Thin Film Systems by Auger Electron Spectroscopical Sputter Depth Profiling

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Wang,  J.Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer,  E.J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Wang, J., & Mittemeijer, E. (2004). A New Method for the Determination of the Diffusion-Induced Concentration Profile and the Interdiffusion Coefficient for Thin Film Systems by Auger Electron Spectroscopical Sputter Depth Profiling. Journal of Materials Research, 19, 3389-3397.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2B8A-6
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