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Sputter-depth profiling for thin-film analysis

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons75598

Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2004). Sputter-depth profiling for thin-film analysis. Philosophical of the Transactions Royal Society of London A, 362, 55-75.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-29DD-B
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