Depth Dependences of the Ion Bombardment Induced Roughness and of the 
Interdiffusion Coefficient for Si/Al Multilayers.

Wang, J. Y.; Zalar, A.; Mittemeijer, E. J.

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Depth Dependences of the Ion Bombardment Induced Roughness and of the Interdiffusion Coefficient for Si/Al Multilayers.

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Wang, J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer, E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Wang, J. Y., Zalar, A., & Mittemeijer, E. J. (2004). Depth Dependences of the Ion Bombardment Induced Roughness and of the Interdiffusion Coefficient for Si/Al Multilayers. Applied Surface Science, 222, 171-179.

引用: https://hdl.handle.net/11858/00-001M-0000-0010-29D7-8

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